MEMS词根词缀

ZnO piezoelectric thin film pressure sensor by MEMS fabrication has the advantage of high sensitivity and miniaturization. It is difficult to make the preparation process of the composite micro-cantilever sensor, and there are compatibility technology problems between the layers.

采用MEMS工艺制作的ZnO压电薄膜压力传感器，具有体积小、易集成、灵敏度和信噪比高等优点。但是复合微悬臂梁式传感器制备工艺较难，各层薄膜工艺存在兼容性问题。

In this thesis, we give full consideration to the compatibility with CMOS technology and fabricate MEMS thermopile IR detector through designing a front-cut thermopile structure.

在本文中，我们充分考虑了与CMOS工艺的兼容性，通过设计一种正面开口的热电堆结构，制作了微机械热电堆红外探测器。

Study of Measurement Methods on Thin-film Thermophysical Properties for MEMS Applications

MEMS中薄膜热物性测试方法研究