DICM的近义词

This measuring system keeps all the advantage of the Dual-frequency Interferometric Confocal Microscope ( DICM): both high resolution ( sub-nanometer) by heterodyne interferometry and relatively large measurement range ( over 5 micron) by confocal method.

该系统保持了双频外差干涉共焦显微镜（DICM）的全部优点：用外差干涉和相位细分技术实现精测，使得轴向测量分辨率达到0.1nm；

DICM has been successfully utilized to measure the mask standard step height and the experimental results agree well with that of the international calibration. The results also show the system has good repeatability with a maximum deviation of 5 nm.

将该系统应用于微电子掩模板台阶高度标准的测量，实验表明DICM的测量值与国际比对结果相符合，系统具有良好的复现性，极限偏差小于5nm。

In this method, images of the membrane surface are captured in real-time by CCD and corresponding computer system. And DICM is subsequently used to obtain large strain by correlating the images captured before and after deformation.

采用CCD及其计算机处理系统，实时获取变形前后膜材表面图像，对变形前后的图像进行相关运算获得应变；